graphite susceptor

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Metalorganic vapour phase epitaxy — (MOVPE), also known as organometallic vapour phase epitaxy (OMVPE) or metalorganic chemical vapour deposition (MOCVD), is a chemical vapour deposition method of epitaxial growth of materials, especially compound semiconductors from the surface… … Wikipedia
Ceramic materials — Ceramic Si3N4 bearing parts Ceramic materials are inorganic, non metallic materials and things made from them. They may be crystalline or partly crystalline. They are formed by the action of heat and subsequent cooling.[1] Clay was one of the… … Wikipedia

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